20” 반도체용 ,Cathode/Jig Grower

Specification

• total height : Max 9776 mm
• Total width : 3,797 mm
• Total weight : Approx. 15 Ton
• Typical Ingot Diameter 204 mm ( 8″ )
• Pull Chamber Height 2865 mm
• Charge Capacity : 150 Kg
• Seed Lift Rate : 0 – 600 mm / hr
• Seed Jog Speed 1000 mm / min
• Crucible Lift Rate : 0 – 1.0 mm / min
• Crucible Jog Speed : 200 mm / min
• Seed Rotation : 1 – 30 rpm
• Crucible Rotation : 0 – 20 rpm